Clean room internal equipment "Horizontal Fully Automatic Reticle Stocker"
The shelf brackets are made from Delrin resin molded products! Since it has a built-in computer, there is a wealth of self-developed software.
We would like to introduce our clean room equipment, the "Horizontal Fully Automatic Reticle Stocker." It features a self-developed class 1 compliant multi-joint arm robot (with ultra-low dust generation mechanism, absolute value control servo motor, position correction using a CCD camera, and variety management capabilities). Additionally, it can accommodate reticle cases from Nikon and Canon in 6-inch sizes, as well as 5-inch reticle cases and other special cases like SMIF cases. 【Features】 ■ An ULPA filter is installed at the front of the shelf, and reticle cases are stocked directly beneath the filter. ■ To prevent shock during case entry and exit, shelf supports are made from Delrin resin molded products. ■ It can be set up with an automatic transport system, and manual or AGV devices can also be used for entry and exit. ■ It has a built-in computer, allowing for a wealth of self-developed software. ■ It is also possible to link with the customer's host computer. *For more details, please refer to the PDF document or feel free to contact us.
- 企業：日本エアーテック 本社
- 価格：Other
